The Scheduling and Performance Analysis of Cluster Tools with Buffers Based on Branch Searching
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摘要: 针对带缓冲与驻留约束的集束型设备调度问题,本文提出了一种基于分枝的搜索调度方法.首先,构造问题域的数学模型,在此基础上提出了一种全局搜索算法;然后,通过数学分析证明引出必要的引理,提出一个基于分枝搜索的算法;最后,进行了仿真实验和分析,结果表明本文提出的算法是有效且可行的,同时还表明了带缓冲模块的集束型设备在一定程度上能提高集束型设备的产能.Abstract: To solve the scheduling problem in a cluster tool with buffers and residency constraints, a search scheduling method based on branch is proposed. Firstly, a basic mathematical model is developed, and a general search algorithm is put forward using the mathematical model. And then several serviceable lemmas are proven through mathematical analysis. A search scheduling method based on branch searching is proposed using the serviceable lemmas. At last, simulation and analysis are conducted and the results also demonstrate the feasibility and effectiveness of the proposed approach. At the same time, the results indicate that the wafers in a cluster tool with buffers can improve the productivity to some extent.
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Key words:
- Cluster tools /
- buffer module /
- residency constraints /
- scheduling /
- branch searching
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图 6 生产率提高与搬运模块繁忙程度的关系
Fig. 6 The relationship of improvement rates with the busy degree of TM
图 7 生产率提高与加工时间之间的关系
Fig. 7 The relationship of improvement rates with processing time of PMs
表 1 $s=s_5$ 时相应参数的值
Table 1 The relevant parameter when $s=s_5$
$k$ 0 1 2 3 $\varphi(k)$ 0 2 1 3 $\varphi^-(k)$ 0 2 1 3 $u_k5$ $\setminus$ 0 1 0 ${{\lambda }_{k}}$ 1 1 1 1 
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