High Precision Pose Measurement of Microsphere-hole Based on Active Movements of Two Microscopic Cameras
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摘要: 在一些微装配任务中, 对微器件姿态的测量是至关重要的一步. 带有微孔的球形微器件, 特征较少, 姿态测量困难. 为此, 本文提出一种基于双目显微视觉的微球孔姿态高精度测量方法. 设计了微球/微孔边缘提取方法, 实现了微球球心和微孔孔心的精确定位. 通过对两路显微相机聚焦轴方向的标定, 弥补了由相机聚焦轴运动引入的测量误差, 提高了微球孔姿态的测量精度. 通过两路倾斜正交的显微相机的主动运动, 计算出微球孔姿态向量在相机运动坐标系中的分解角. 根据相机运动坐标系与微球调整平台坐标系间的角度转换矩阵, 将相机运动坐标系中的分解角转换为微球调整平台坐标系中的旋转角, 从而计算出精确的微球孔姿态向量. 实验结果表明, 微球孔姿态测量的最大误差为0.08°, 验证了本文方法的有效性.Abstract: In some microassembly tasks, the pose detection of micro-components is a crucial step. It is very difficult to measure the poses of spherical micro-components with micro-holes due to the lack of efficient features. A high-precision pose measurement method for the micro-hole on a micro-sphere is proposed based on binocular micro-vision. The edge extraction methods for the micro-sphere and micro-hole are designed. The image coordinates of the micro-sphere center and micro-hole center are obtained in high accuracy. The focusing movement directions of the two microscopic cameras are calibrated, which can compensate the measurement error caused by the focusing motions to improve the measurement accuracy of micro-hole＇ s pose. Through the active motions of two inclined orthogonal microscopic cameras, the decomposed angles of the micro-hole＇ s vector in the two frames of motion mechanisms for microscopic cameras are calculated. The decomposed angles are transformed to the rotation angles of the micro-sphere adjusting platform according to the angle transformation matrix from the two frames of motion mechanisms for microscopic cameras to the frame of micro-sphere adjusting platform. The micro-hole＇ s vector is computed with the rotation angles in high accuracy. The experimental results show that the maximum measurement error of the rotation angles indicating the micro-hole＇ s pose is 0.08 degrees. It verifies the effectiveness of the proposed method.
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图 6 微球图像中一行的灰度值变化曲线图
Fig. 6 Gray value change graph of one line in the microsphere image
图 8 微孔边缘检测与微孔中心的拟合
Fig. 8 The detection of micro-hole edge and fitting of micro-hole center
图 9 微球孔姿态测量原理示意图
Fig. 9 Schematic diagram of microsphere hole pose measurement principle
图 11 实验过程中采集的微球和微孔图像
Fig. 11 Microsphere and micro-hole images acquired during the experiment
图 12 用向量表示的微球孔姿态实验结果
Fig. 12 Experimental results of microsphere hole poses expressed by vector
表 1 绕
$ X _{W} $ 轴旋转的实验结果(°)Table 1 Experimental results of rotation along with the
$ X _{W} $ axis (°)次数 本文方法 文献 [20] 真实值 ${\alpha}_{m1},$ ${\beta}_{m1}$ ${\alpha}_{m2},$ ${\beta}_{m2}$ ${\alpha}_{r},$ ${\beta}_{r}$ 1 2.03, 0.00 2.08, 0.04 2.00, 0.00 2 4.05, 0.04 3.90, 0.08 4.00, 0.00 3 6.05, 0.03 6.11, 0.10 6.00, 0.00 4 8.02, −0.04 8.18, 0.15 8.00, 0.00 5 −2.03, 0.04 −2.05, 0.03 −2.00, 0.00 6 −3.95, 0.05 −3.91, 0.04 −4.00, 0.00 7 −5.95, −0.04 −6.12, −0.08 −6.00, 0.00 8 −7.96, −0.03 −8.13, −0.13 −8.00, 0.00 
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表 2 绕
$ Y _{W} $ 轴旋转的实验结果(°)Table 2 Experimental results of rotation along with the
$ Y _{W} $ axis (°)次数 本文方法 文献 [20] 真实值 ${\alpha}_{m1}$, ${\beta}_{m1}$ ${\alpha}_{m2}$, ${\beta}_{m2}$ ${\alpha}_{r}$, ${\beta}_{r}$ 1 −0.06, 1.05 0.06, 1.07 0.00, 1.00 2 0.02, 1.92 0.04, 2.12 0.00, 2.00 3 0.08, 2.99 0.04, 3.11 0.00, 3.00 4 0.03, 4.03 0.05, 4.13 0.00, 4.00 5 −0.05, 5.04 −0.07, 5.16 0.00, 5.00 6 0.01, −1.01 −0.04, −1.09 0.00, −1.00 7 0.06, −2.04 −0.06, −2.11 0.00, −2.00 8 −0.04, −3.06 −0.05, −3.13 0.00, −3.00 9 0.07, −4.06 −0.07, −4.16 0.00, −4.00 10 0.01, −5.07 −0.10, −5.17 0.00, −5.00
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表 3 绕
$ X _{W} $ 轴及$ Y _{W} $ 轴旋转的实验结果(°)Table 3 Experimental results of rotation along with the
$ X _{W} $ and$ Y _{W} $ axis, simultaneously (°)次数 本文方法 文献 [20] 真实值 ${\alpha}_{m1}$, ${\beta}_{m1}$ ${\alpha}_{m2}$, ${\beta}_{m2}$ ${\alpha}_{r}$, ${\beta}_{r}$ 1 1.03, 1.05 0.93, 1.03 1.00, 1.00 2 2.02, 0.98 1.86, 1.10 2.00, 1.00 3 3.01, 2.04 3.10, 2.08 3.00, 2.00 4 3.97, 3.04 3.89, 3.18 4.00, 3.00 5 4.96, 5.07 5.20, 4.88 5.00, 5.00 6 −1.01, −2.00 −1.04, −2.05 −1.00, −2.00 7 −2.02, −3.04 −1.92, −2.89 −2.00, −3.00 8 −3.03, −0.97 −3.07, −0.95 −3.00, −1.00 9 −3.96, −1.97 −3.85, −2.14 −4.00, −2.00 10 −4.99, 4.04 −4.83, 4.10 −5.00, 4.00
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